Cutting， scribing and drilling in LED industry and power electronics industry.
Materials include Al2O3, AlN, ZrO2, Si3N4 and SiC etc.
Sample
Advantages
1．Liner motor with position accuracy of 3um；
2． CCD visual position technology can compensate the deformation of material to the largest extent.
3． Scribing with high speed and high efficiency
4． The software with clear interface is very easy to be used.
Technical parameters
Wavelength：10.6um\1064nm (optional)
Laser Power：100-500W
Range：600mm X 500mm（Custom design）
XY stage position accuracy： 3um
XY stage max speed：1000mm/s
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